FEI APREO is a Field Emmision scanning electron microscope (SEM) in which electrons are used to image the surface of a sample. This allows high magnifications.
At low acceleration voltage, Apreo’s acceleration tube design helps to optimize both resolution and contrast.
It obtains excellent contrast-to-noise ratio using its biased in-lens detectors which pull both SE and BSE signals in.
The T1 detector, positioned very close to the sample, collects a wide angular range and wide BSE energy range of
signal electrons, and it is standard in the tool configuration.
Also T2, the in-lens SE detector is standard as well as beam deceleration functionality. As a result, Apreo’s default
configuration is already optimal for low voltage contrast.