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EBL Elionix workstation (1151)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Mark Chiappa
2nd Responsible:
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Description
Beamer workstation with full WECES software. In K1-142.
Details
Tool name:
EBL Elionix workstation
Area/room:
EBL and SEM
Category:
Lithography
Manufacturer:
Elionix
Model:
N/A
Tool rate:
Zero
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