Picture of Piranha Etch Course
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Piranha solution is a mixture of concentrated sulphuric acid (H2SO4) and hydrogen peroxide (H2O2), used for removing organic residues from substrate.

This solution is VERY energetic and may result in explosion or injury resulting from chemical and thermal burns so extreme caution must be taken when preparing, handling and disposing it. Piranha reacts with most plastics and therefore only glassware, Teflon and stainless steel may be used when handling.

The piranha process should be carried out in one of the acid fumehood in the lithography or chemical area.

Tool name:
Piranha Etch Course
Area/room:
Chemical area
Category:
Other processes
Manufacturer:
-
Model:
-
Tool rate:
Zero
Max booking time, day:
hours
Max booking time, night:
hours
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