Picture of CVD
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Martijn de Roosz
2nd Responsible:
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Description

Thermal CVD made by Graphene Square. Can be used for graphene synthesis, CNT + + 

Specs:

  • Max temp 1000C
  • Gases controlled with MFC: CH4, H2, Ar
  • N2 for venting.
  • Ultimate vacuum: 5E-4 Torr.
  • Quartz tube diameter for samples: 1.5"

 

Details
Tool name:
CVD
Area/room:
Bionano
Category:
Deposition
Manufacturer:
Graphene Square
Model:
TA100
Tool rate:
B
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Tool Modes
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