Picture of Nanoimprinter SCIL
Current status:
AVAILABLE
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SCIL (Substrate Conformal Imprint Lithography) is a technique for large area imprint. We use a PDMS replica made from a master mold which is bonded to a piece of thin glass as a working stamp.  At NanoLab we have all the tooling to make stamps up to 6”.

 

Tool name:
Nanoimprinter SCIL
Area/room:
Lithography & Wet Etch
Category:
Lithography
Manufacturer:
Karl Süss
Model:
SCIL
Tool rate:
A
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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