Picture of Wafer Dicing Saw
Current status:
DOWN
Book | Log
Show/Collapse all

1st Responsible:
2nd Responsible:
You must be logged in to view files.

The dicing saw uses a high speed spindle with a thin diamond blade to dice, cut, or groove semiconductor wafers, silicon, glass, ceramic, crystal, and many other types of material.The blade is cooled with DIW water when spinning.

  • Materials allowed: everything which is not considered as contaminating within NanoLab rules, sample size can’t exceed 152.4 mm (6”) in diameter.
  • Spindle Type:Air BearingsMaximum
  • Spindle Speed:Max 30,000 RPM
  • Vertical Axis Travel: 20.1 mm (0.79”)
Tool name:
Wafer Dicing Saw
Area/room:
Supporting Labs
Category:
Bonding and packaging
Manufacturer:
disco abrasive systems
Model:
DAD- 2H/6
Tool rate:
B

Instructors

Licensed Users

You must be logged in to view tool modes.