Picture of Ovens for Lithography Processes
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AVAILABLE
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These ovens are for soft/hard baking in lithography processes. There is one oven in the lithography area and one in the student lab. Maximum temperature 200°C. No licence is needed.

Tool name:
Ovens for Lithography Processes
Area/room:
Lithography & Wet Etch
Category:
Lithography
Manufacturer:
Memmert
Model:
U26
Tool rate:
Zero
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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