.
.
Picture of HF Vapor Release Etcher
Current status:
AVAILABLE
Book | Log| 
Show/Collapse all

Responsibles
1st Responsible:
Ricardo Matias Trujillo
2nd Responsible:
Martijn de Roosz
Files
You must be logged in to view files.
Description
Details
Tool name:
HF Vapor Release Etcher
Area/room:
Thin Film & Dry Etch
Category:
Dry etch
Manufacturer:
SPTS
Model:
uEtch
Tool rate:
A
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
You must be logged in to view tool modes.