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EMS Hotplates in Litho (1155)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Mark Chiappa
2nd Responsible:
Mathilde Barriet
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Description
Two seperate hotplates controlled by the same interlock/LIMS Tool ID.
Details
Tool name:
EMS Hotplates in Litho
Area/room:
Lithography & Wet Etch
Category:
Lithography
Manufacturer:
EMS
Model:
Twin 4" and 6"
Tool rate:
Zero
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