Picture of RTP Allwin 1 Organic
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The AccuThermo AW 610 is a rapid thermal processing (RTP) system, which uses high intensity visible radiation to heat single wafers for short periods of time at precisely controlled temperatures. The process periods are typically 1 to 600 sec in duration.

This is not a furnace and can not handle high temperature for a long period of time.

Max time for typical temp:

500C up to 25 min

700C up to 10 min

900C up to 3 min

1100up to 1 min

Tool name:
RTP Allwin 1 Organic
Area/room:
Chemical area
Category:
Thermal processes
Manufacturer:
Allwin21
Model:
AW610
Tool rate:
B
Max booking time, day:
10 hours
Max booking time, night:
10 hours
No. of future bookings:

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