Picture of EBL Elionix workstation
Current status:
AVAILABLE
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The EBL Elionix workstation is located in K1-148, outside the Nanolab Cleanroom (no cleanroom attire necessary)..

The EBL Elionix workstation is a dedicated computer for EBL pattern preparation.

  • The workstation has ELS-G100 WecaS CAD software installed in offline mode.
    • Files can be converted to a compatible file format, exposure parameters defined, and ready to be run on the ELS-G100 machine.
    • Patterns can also be edited and viewed before using WecaS CAD. 
  • The workstation has BEAMER and TRACER software from GenISys for advanced pattern editing, simulation, and conversion.

 

 

 

Tool name:
EBL Elionix workstation
Area/room:
EBL and SEM
Category:
Lithography
Manufacturer:
Elionix
Model:
ELS-G100
Tool rate:
Zero

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Licensed Users

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