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Operator service is possible, or a demo session with your sample. Please contact nanolab@ntnu.no for this.

The JSM-6480LV is a mid-range, scanning electron microscope (SEM) with a tungsten filament.

Resolution of 4.0 nm @ 30 kV 

Sample size: Up to 8" wafers possible

The low vacuum mode, allows for observation of specimens which cannot be viewed at high vacuum due to excessive water content or due to a non-conductive surface. 

Tool name:
JEOL SEM
Area/room:
Supporting Labs
Category:
Characterization
Manufacturer:
JEOL
Model:
JSM-6480LV
Tool rate:
Zero

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