Operator service is possible, or a demo session with your sample. Please contact nanolab@ntnu.no for this.
The JSM-6480LV is a mid-range, scanning electron microscope (SEM) with a tungsten filament.
Resolution of 4.0 nm @ 30 kV
Sample size: Up to 8" wafers possible
The low vacuum mode, allows for observation of specimens which cannot be viewed at high vacuum due to excessive water content or due to a non-conductive surface.