Four vacuum compatible micromanipulators (MiBots) fitted with tungsten probes. Currently only used in FIB\SEM.

Applications:

• In situ material characterization
• Micro / nano handling
• Electrical probing (failure analysis)
• MEMS testing
• Microassembly

Technical Specifications

Degrees of Freedom
4: 2 translations (X & Y –> body)
2 rotations (R & Z –> body & arm)
Dimensions & Weight
body: 20.5 x 20.5 x 13.6 mm3
arm: 8.3 mm (without tool)
weight: 12 g (without tool)
Motion Range stepping: X and Y: typ. 5 cm (limited by cable)
R: ± 180°
Z: 42° (arm rotation)
scanning: X: 440 nm
Y: 250 nm
Z: 780 nm
Positioning Resolution
stepping: X: 60 nm scanning: 1.0 nm
Y: 40 nm 0.5 nm
Z: 100 nm 1.5 nm
Speed X and Y: < 2.5 mm/s
Z: < 150 mrad/s
Forces & Torques X and Y: push: 0.3 N Z: lift: 0.7 Nm (5 g)
hold: 0.2 N hold: 0.9 Nm (6 g)
Temperature Range 273 K to 353 K
Humidity < 95% (non condensing)
Lowest Pressure 10-7 mbar 1
Probing Signal voltage: ± 100V
current: < 100fA 2 – 100mA
frequency: < 20MHz 2
resistance: typ. 3.5 Ω