Picture of SCIL Replication tool
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Mark Chiappa
2nd Responsible:
Ken Roger Ervik
Files
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Description
Details
Tool name:
SCIL Replication tool
Area/room:
Lithography & Wet Etch
Category:
Lithography
Manufacturer:
Sûss
Model:
MRT
Tool rate:
Zero
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
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