A UV ozone cleaner removes organic contaminants on surfaces. Oxygen (from ambient air or an external supply) within the chamber is turned into ozone by a UV-lamp, and degrades surface comtaminants. This treatment is especially suitable for SEM samples and AFM probes. The cleaning process can be run at temperatures up to 150°C. 

The chamber will fit samples that are no more than approximately 200*200*200 mm.