Picture of HF Vapor Release Etcher
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Ricardo Matias Trujillo
2nd Responsible:
Martijn de Roosz
Files
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Description
Details
Tool name:
HF Vapor Release Etcher
Area/room:
Thin Film & Dry Etch
Category:
Dry etch
Manufacturer:
SPTS
Model:
uEtch
Tool rate:
A
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
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