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EMS Hotplates in Litho (1155)

Current status:

AVAILABLE

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Responsibles

1st Responsible:

Mark Chiappa

2nd Responsible:

Files

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Description

Two seperate hotplates controlled by the same interlock/LIMS Tool ID.

Details

Tool name:

EMS Hotplates in Litho

Area/room:

Lithography & Wet Etch

Category:

Lithography

Manufacturer:

EMS

Model:

Twin 4" and 6"

Tool rate:

Zero

Tool Modes

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