Picture of E Beam Evaporator - K.J. Lesker
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AVAILABLE
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The Lesker E-beam evaporator is the newest evaporator in NanoLab. It is a tool dedicated for metal evaporation. The machine is fully automated and therefore very user friendly. Sample loading is easy and pump down time is fast.

Specifications:

  • 8 x 20 cc material pockets
  • Sample size up to 6 inch in diameter
  • Available targets: Ti, Au, Al, Cu, Pt, Cr, NiFe (other metals on request)
  • Deposition rate: 1 - 5Å/s (depending on material)
  • Film thickness: 0,5 nm - few hundred nm (depending on material)
Tool name:
E Beam Evaporator - K.J. Lesker
Area/room:
Thin Film & Dry Etch
Category:
Deposition
Manufacturer:
K.J. Lesker
Model:
PVD 200
Tool rate:
A

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