Picture of Theory of Lithography Chemistry
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This course is a practical chemistry course intended for NanoLab users that have no background in chemistry, and that are going to work in the Lithography area. The main aim of this course is to give a general introduction to chemicals that are used in lithography. After having performed this introduction course, you should be able to:

  1. Understand the chemistry of acids and bases
  2. Work and understand the risks of working with strong acids
  3. Prepare dilutions of acids and base
  4. Waste handling of acids
  5. Properly use micro pipettes and beakers
  6. Understand the chemistry of photolithography and photoresists
Tool name:
Theory of Lithography Chemistry
Area/room:
Lithography & Wet Etch
Category:
Chemical methods
Manufacturer:
Birgitte
Model:
1
Tool rate:
Zero
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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