Picture of EBL and SEM area slot 1
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Mark Chiappa
2nd Responsible:
Files
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Description

This is an area. Not an instrument.

Details
Tool name:
EBL and SEM area slot 1
Area/room:
EBL and SEM
Category:
Lithography
Manufacturer:
NTNU NANOLAB
Model:
NTNU NANOLAB
Tool rate:
Zero
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Licensed Users

Tool Modes
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