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Thin film area slot 2 (2)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Martijn de Roosz
2nd Responsible:
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Description
This is an area. Not an instrument.
Details
Tool name:
Thin film area slot 2
Area/room:
Thin Film & Dry Etch
Category:
Dry etch
Manufacturer:
NTNU NANOLAB
Model:
NTNU NANOLAB
Tool rate:
Zero
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